Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels
نویسندگان
چکیده
منابع مشابه
Atomic Layer Deposition of Aluminum Oxide
I Acknowledgements II Dedication III List of Figures V
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ژورنال
عنوان ژورنال: Physical Chemistry Chemical Physics
سال: 2020
ISSN: 1463-9076,1463-9084
DOI: 10.1039/d0cp03358h